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AlGaN/GaN high electron mobility transistors (HEMTs) are in high demand for wireless communication and power conversion applications due to their high-power and high-frequency capabilities. However, the extremely high operational heat flux often leads to the formation of hotspots that negatively impact the device performance and reliability. In this work, an AlGaN/GaN HEMT with a transparent indium tin oxide (ITO) gate was fabricated to enable in situ characterization of the channel peak temperature that occurs underneath the gate electrode. Raman thermometry was performed to measure the temperature of the GaN layer under various bias conditions while power dissipation was kept constant. An electro-thermal device model was created to validate experimental results, to explain the physical origins of the bias-dependent self-heating behavior, and to calculate the peak temperature of the two-dimensional electron gas channel. Experimental results show that the temperature measured next to the drain side edge of the gate (which is a normal practice when characterizing a standard metal-gated device) resulted in a 32% lower value than the temperature underneath the drain end of the gate acquired from the ITO-gated device. This underestimation of temperature could result in overestimation of the component lifetime during accelerated operational life tests. 

Gallium nitride (GaN)-based high electron mobility transistors (HEMTs) are essential components in modern radio frequency power amplifiers. In order to improve both the device electrical and thermal performance (e.g., higher current density operation and better heat dissipation), researchers are introducing AlN into the GaN HEMT structure. The knowledge of thermal properties of the constituent layers, substrates, and interfaces is crucial for designing and optimizing GaN HEMTs that incorporate AlN into the device structure as the barrier layer, buffer layer, and/or the substrate material. This study employs a multi-frequency/spot-size time-domain thermoreflectance approach to measure the anisotropic thermal conductivity of (i) AlN and GaN epitaxial films, (ii) AlN and SiC substrates, and (iii) the thermal boundary conductance for GaN/AlN, AlN/SiC, and GaN/SiC interfaces (as a function of temperature) by characterizing GaN-on-SiC, GaN-on-AlN, and AlN-on-SiC epitaxial wafers. The thermal conductivity of both AlN and GaN films exhibits an anisotropy ratio of ∼1.3, where the in-plane thermal conductivity of a ∼1.35 μm thick high quality GaN layer (∼223 W m−1 K−1) is comparable to that of bulk GaN. A ∼1 μm thick AlN film grown by metalorganic chemical vapor deposition possesses a higher thermal conductivity than a thicker (∼1.4 μm) GaN film. The thermal boundary conductance values for a GaN/AlN interface (∼490 MW m-2 K−1) and AlN/SiC interface (∼470 MW m−2 K−1) are found to be higher than that of a GaN/SiC interface (∼305 MW m−2 K−1). This work provides thermophysical property data that are essential for optimizing the thermal design of AlN-incorporated GaN HEMT devices.